Sawyer型平面モータの精密位置決めに関する研究 : 位置決めシステムの提案と微小位置決め実験

概要

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This paper describes a precision positioning system for a planar motion stage driven by a Sawyer motor, which is composed of a platen and forcers moving on the platen. Position measurement of the stage moving part (forcers) is conducted by a surface encoder consisting of a thin angle grid film stuck on the platen and an angle sensor mounted on the moving part. The angle grid surface is a superposition of periodic sine waves in the X- and Y-directions with amplitudes of 100nm and wavelengths of 100μm. The two-dimensional (2D) angle sensor is used to read the sine waves, which are used as scales for measurement of X- and Y-positions. The thickness of the angle grid film is 100μm so that the driving performance of the Sawyer motor is not affected. Experimental results have confirmed that sub-micrometer positioning can be realized by closed-loop control.
公益社団法人精密工学会の論文
2005-04-05