パラレルリンク式微動ステージの6自由度位置決め制御

概要

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This paper describes a position control method and a control system configuration for newly developed fine motion stage using parallel linkage mechanism. A new static decoupling control method is proposed to compensate interference characteristics of 6-axes stage, including compensation of machine and actuator accuracy. Its decoupling parameters (Jacobian matrix) are calibrated by iterative process, and as a result total decoupling accuracy of 5% is obtained. The control algorithm, which requires complicated matrix calculation, could be executed within 250μs by parallel processing method using multi transputers. By experimental results of step response for each degree of freedom, it is confirmed that proposed decoupling method is more effective than conventional one. Consequently positioning resolution of 0.01μm (x, y), 0.123μrad (θ_Z), response of 30-40 Hz, and dynamic rigidity of more than 12.3 N/μm (x-direction, frequency <40 Hz) are obtained.
公益社団法人精密工学会の論文
1992-04-05