2次元角度格子と2次元角度センサを組み合せた面内変位検出機構の開発

概要

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This paper presents a newly developed displacement sensor system. Usually, interferometer or linear encoder is used to monitor motion of precision stages. However, these sensors are operated in one dimension only. Hence, if device has many degrees of freedom, number of sensors to monitor its motion has to be the same as the number of degrees of freedom. It adds complexity to the designing machine layout. In this study, 2-dimensional displacement sensor system is proposed. This system consists of 2-dimensionai angle sensor and 2-dimensional angie grid. Because of the angle independency of x and y direction, it is possible to monitor x- and y- components of motion from the angle sensor outputs. This system also can improve its ability by using in-situ self calibration to calibrate sensors and angle grid. 2-dimensional angle sensors have been deveioped for proposed system and the basic performance has been tested. The sensors can clearly detect 2-dimensional angle grid. From displacement measuring experiment, it appears that proposed system could monitor stage movement within 2 μm errors with in-situ self calibration compensation.
公益社団法人精密工学会の論文
2000-02-05