インプロセス計測加工精度補償の研究(第2報) : K-HIPOSSと平行板ばね式微小切込み工具台の応用

概要

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Following the precision machining method with a control system ( Workpiece-Referred Form Accuracy Control : WORFAC ) proposed in the previous report, in this report the system and an experiment with an in-process measurement sensor, K-HIPOSS, and a parallel leaf-spring micro-tool servo are described. Comparing to the standard HIPOSS model, K-HIPOSS features a long working distance and a wide dynamic range of about 6/Jm, so that it is more suitable for in-process measurement. A parallel leaf-spring micro-tool servo uses a piezoelectric actuater to drive the diamond tool, of which displacement is detected by the strain - gauges on the leaf-springs. This strain signal is used for compensating the hysteresis of a piezo electric stack and improving the motion performance of a feedback loop. The WORFAC experiment was applied to a simple plane - mirror turning and the result demonstrated its perfect compensation for disturbances.
公益社団法人精密工学会の論文
1990-01-05