超精密非球面加工機の運動誤差測定(第2報) : 運動誤差の機上測定実験(G13-2 機械加工および工作機械(2),G13 生産加工・工作機械部門)

概要

論文の詳細を見る
A capacitance probe-based system is developed for measurement of carriage Straightness and roll error motions. The system, which is added to a conventional laser interferometer, consists of a probe-unit and an auxiliary flat surface. The profile error of the flat surface, which is moved by the carriage, is first measured with the X-probes accurately through separating the carriage lateral Straightness error (Z-error). The auxiliary flat surface is then used as an accurate reference for carriage lateral Straightness error measurement. The roll error of the carriage can be measured by dividing the difference of the Y-probes by the probe distance between the Y-probes. The developed system has been applied to the measurement of an ultra-precision aspheric grinding machine. The Straightness error and roll error were measured to be 120nm and 2.4arcsec over a stroke of 80mm, respectively.
一般社団法人日本機械学会の論文
2004-09-04