313 高精度低測定力機上測定機の開発(OS-10 加工計測・評価)

概要

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This paper describes an instrument called nanoshape for measuring surface forms of aspheric optical elements on the processing machine. The effectiveness of the on-machine measurement system is confirmed by the result of compensation processing based on the measurement data. The instrument employs a contact-type scanning stylus. An original inclined self-weight method is designed to control the contact force. In this method, the contact force is generated by inclining the air slider of the instrument, on which the stylus is attached, from the horizontal plane only a little below the stylus. As a result, an extremely steady low contact force (measuring force) can be easily achieved. This method has a peculiar error that occurs by inclining. This error tends to increase as the angle of inclining grows. The evaluated radius variation can be reduced enough by setting the measuring force to tens of milligrams.
社団法人日本機械学会の論文
2006-11-24