211 電気粘性流体援用マイクロ超音波加工に関する研究(OS-7 ナノ・マイクロ加工)

概要

論文の詳細を見る
Ultrasonic Machining (USM) is known as an effective method for machining brittle materials. The materials are removed by impacts of the abrasive grains which are pressurized by ultrasonic vibrating tools. The purpose of this research is to make micro grooves on the brittle materials accurately and efficiently by ultrasonic machining. Using the electrorheological fluid assisted USM, we could make an accurate micro groove on brittle materials. In this paper, the decrease of the average diameter of abrasive grains according to the progress of the machining is investigated, in order to take a first step to make micro grooves efficiently. The results show that the average diameter of abrasive grains decreases according to the amount of the removed materials.
社団法人日本機械学会の論文
2006-11-24