マイクロ非球面の超精密研削に関する研究 (第3報) : 斜軸研削における非球面(凹面)の微小化の検討

概要

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In this study, a new grinding method and a grinding system with the inclined rotational axis of micro grinding wheel were developed. In the previous report, the wheel was formed to a precise columnar shape of 0.8 mm in the diameter by a single crystal diamond truer on the machine. By the developed system, in grinding test of the workpiece of about 0.7 mm radius curvature, the form accuracy of about 0.1 μm P-V and surface roughness of less than 0.03 μm Ry were obtained. Recent trend is the further micronization of aspherical optical components. Therefore in this report micronizing of aspherical surface was examined by the ultra-high speed grinding spindle of 15 x 10^4 rpm at the maximum rotational rate and micro wheel of about 0.3 mm in radius curvature. In the grinding test, WC (tungsten carbide) molding die of less than 0.3 mm radius curvature was tested and the form accuracy of about 0.1 μm P-V was obtained.
社団法人精密工学会の論文
1998-09-05