402 ERゲルを用いたエアスライダ用クランプ機構の開発(OS4 最新機械要素技術)(OS16 トライポロジー・軸受技術)

概要

論文の詳細を見る
The air slider is used as a guide element for the semiconductor exposure devices. When the positioning of the table attached to the slider is fixed, mechanical clamper such as solenoid is used and exerts a high clamping force on the slider table. However, the high clamping force causes the table to be moved in micrometer order. Therefore, the development of an excellent clamping mechanism with low clamping force and the high response is hoped for. In this study, a new functional material (ER gel) is developed which can generate a variable clamping force in response to an electric field, and applied to the clamping mechanism of the air slider. As the result, the developed ERG clamper is more effective than the conventional mechanical one.
社団法人日本機械学会の論文
2004-11-19