マイクロ非球面の超精密研削に関する研究 (第2報) : 砥石の各種誤差要因が形状誤差に与える影響およびその補正法の検討

概要

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The micro precise aspherical molding dies have been increasingly required. A new grinding method and a grinding system with 45 degrees inclined rotational axis of micro grinding wheel were developed. In the grinding test, a micro wheel of resinoid bonded diamond wheel was developed and WC (tungsten carbide) aspherical molding die were tested. By the developed system, the form accuracies of about 0.1 μm P-V and the surface roughness of less than 0.03 μm Rmax were obtained and its machining feasibility was clarified. In this report, the effects of the wheel radius error and the wheel positioning errors (horizontal and vertical directlons) on the workpiece form accuracies are simulated and its compensation methods are discussed. Finally, in the aspherical grinding tests, the grinding examples of tungsten carbide by using a proposed compensation methods are examined.
1998-08-05