マイクロフレネルレンズ成形型の超精密研削 : 超硬合金型の研削加工の可能性検証

概要

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his paper deals with the precision grinding of micro fresnel shape with some micro grooves. Fresnel lenses are useful for the next generation type of optical devices because of its thin structure and excellent optical characteristics. In the conventional machining method, the lens materials were restricted to plastics, because the cutting tool was a single crystal diamond and the molding die material was restricted to a soft metal such as copper or electroless deposited nickel-phosphorous (Ni-P) alloy. In this paper, a grinding system of 4-axes (X, Y, Z, C), and a new grinding method with vertically controlled grinding spindle and the disk type wheel of knife edged shape were developed. At frrst, the effects of the wheel feed rate control method on the workpiece form accurracies and surface" roughness of flat shape WC workpiece were discussed. Finally, in a feasibility study of the fresnel shape grinding, the molding dies of tungsten carbide for glass lens were ground in trial. The experimental results show that a form accuracy of about 0.1μmP-V and surface roughness of about 10 nmRy were obtained and this new grinding system was useful.
社団法人精密工学会の論文
1999-08-05