高出力両面駆動形積層静電モータ

概要

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This paper describes a high-power electrostatic film actuator that consists of double-sided drive type films. There have been several reports on electrostatic actuators that utilize stacks of electrode films. However, in those actuators, the electrode films can generate strong electric field only on the front faces of the films, and thus, thrust force can be generated only when front faces are opposed. In this paper, a new structure for the electrode film, in which strong electric field can be generated on both faces of the films is reported. It was verified with fabricated prototype films that a pair of new structure films can generate thrust force even when their back faces are opposed. A thin linear actuator with twenty-one films is fabricated, and its output power and efficiency are investigated. The actuator generated power over 3.5W when applied voltage was 1.4kV_<0-p>. Maximum efficiency was measured to be 46%.
公益社団法人精密工学会の論文
2005-10-05