逐次精密切削加工による試料内部3次元情報取得システムの開発

概要

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Recent advances in computer-aided engineering technologies need more accurate modelings techniques of three-dimensional shapes, internal structures of manufactures. In this paper, an automated system was newly developed to acquire the three-dimensional information. The system is based on consecutive precision machining and cross-sectional image recording. In the system, face milling by a single crystal diamond tool is used for high precision machining, and an optical microscope is used for cross-sectional image recording. By the system, following results were obtained: (1) Surface roughness of a resin embedded aluminum specimen was approximately 100nm p-v. (2) Two-dimensional color cross-sectional images of the specimen were consecutively recorded from top to bottom. (3) The aluminum was distinguishable from the surrounding resin in those images, and the resin was also distinguishable from air. (4) The aluminum and the resin were three-dimensionally reconstructed respectively from those images, and precise three-dimensional shapes and internal structures were acquired.
2008-06-05