液滴塗布装置の吐出異常検知に関する研究

概要

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In recent years inkjet technology has a wide range of application including Flat Panel Display and Semiconductors. As compared with consumer appliances, industrial inkjet requires higher specifications in terms of dot placement accuracy and droplet volume uniformity. The stability of inkjet is a major requirement and then an in-situ monitoring system for inkjet condition is strongly required to prevent inferior products. In piezo-driven inkjet heads, the piezo actuators can be used as sensors to detect jetting failures caused by air bubbles. This might be the key technology to improve the reliability of the inkjet process. In this paper, we propose the model of jetting failure detection system and point out how the modification of the inkjet driving circuit for better jetting performance influences on the detection results. The prototype of the jetting failure detection system is developed and used to validate the detection algorithm both in time and frequency domain. This prototype and detection algorithm can realize the in-situ monitoring for all jetting due to high-speed system configuration.
公益社団法人精密工学会の論文
2008-07-05