317 マイクロ機械加工法とフォトリソグラフィを組み合わせた微細構造創成の試み(OS6 マイクロ加工(2))

概要

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To make three-dimensional complex structures by multi-layer LIGA-like process, or to fabricate simple columnar structures that require their surface performance, good surface flatness and high resolution are needed. We introduced a single point diamond turning (SPDT) as a cutting technology and Electrolytic in-process dressing (ELID) grinding as a grinding one for fabricating flat structure of thick resist, that is SU-8, and electroplated nickel. In view of experimental results, the lift-off happened in the fabrication of SPDT, while ELID grinding resulted in clear and sharp outline of two materials and good surface flatness. The microstructure formed by electroplating together with thick resist itself was successfully machined to be flat by ELID grinding, which will be very effective in fabricating precision microstructure or multi-layered ones.
社団法人日本機械学会の論文
2001-11-20