K-0701 ELID研削による超硬質皮膜の表面機能創成(S07-1 薄膜の創製と評価)(S07 表面改質とその機能特性評価)

概要

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Advanced films coated with CVD process, such as CrN and TiAlN are attractive for many application due to their high strength at elevated temperatures, chemical stability and wear resistance. However, the surface roughness of that films are not enough to achieve higher tribological characteristics. On the other hand, Electrolytic In Process Dressing (ELID) grinding provides the ability to produce specular finishes on brittle material surfaces, with surface roughness on the nanometer scale (4 to 6 nanometers). This paper presents the results of ELID grinding experiments of TiAlN film and the characterization of triborogical behaviors. High quality surface can be achieved on TiAlN film by using the ELID grinding technique. Typical surface roughness is around Ra 0.0062 μm with a #4000 wheel. The scanning electron microscopy (SEM) also showed improvement of the ELID ground TiAlN film surface with respect to the shape of the grinding marks. Compared with TiAlN film (non-ELID grinding), ELID ground TiAlN film produced excellent results in terms of triborogical behaviors. Friction coefficient μ of TiAlN film remained higher level about 0.87, and that of ELID ground TiAlN film remained lower level about 0.17.
一般社団法人日本機械学会の論文
2001-08-22