303 水草カーボンを用いたELID研削技術(精密/微細加工と評価)

概要

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In this study, a metal-free electro-conductive resinoid bonded wheel made of waterweed carbon as the conductive material was experimentally built to reduce metal ions in the grinding fluid and metal contamination of the work piece in the aim to develop environmentally-friendly ELID grinding techniques. At the same time, characteristics of initial electrolytic-dressing and grinding were also investigated. The results showed that the prototyped metal-free electro-conductive resinoid bonded wheel consisted of a layer of oxides with high oxygen level formed on the wheel surface by electrolytic dressing. The layer generated by electrolytic dressing was found to wear more easily than the matrix composition and in addition have a high frictional coefficient. For the purpose of checking the difference of #1200 and #8000 waterweed grinding wheel's effect, mono-crystalline silicon was ground with ELID, and grinding performance was measured. Using the wheel with ELID, high quality surfaces of 50nmRy were successfully achieved.
社団法人日本機械学会の論文
2007-09-28