807 超精密ELID研削システムによる高精度マイクロ加工(オーガナイズドセッション : 加工・機械の構造と機能の進化)

概要

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ELID grinding technique is expected to contribute greatly to precision grinding, particularly in the field of mirror finishing hard and brittle materials. ELID-grinding can produce ultraprecision grinding performances especially under specific machine such as hydrostatic bearing and submicron feeding control. The authors thus proposed a new ultraprecision mirror surface machining system with ELID. The machine has three linear axes, which can be controlled at a feeding resolution of 10nm under full closed feedback. 3-axes double hydrostatic guideway are used for sliding the machine, and hydrostatic bearing is used for the grinding wheel spindle. This paper introduces the concept of the developed ultraprecision ELID-grinding system, the specifications, and trial use in metal mold material.
社団法人日本機械学会の論文
2000-09-08