212 真空環境対応静電浮上式リニアモータの開発

概要

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To drive a motor in vacuum condition, many factors must be considered, such as friction and heat generation. Therefore it is difficult to use typical motors in vacuum condition. Besides, in some vacuum applications like EB lithography, SEM, and TEM, electromagnetic motors are unlikely to be used since existence of electromagnetic field is a fatal problem. This paper proposes the application of non-contact levitation electrostatic motor using Dual Excitation Multiphase Electrostatic Drive (DEMED) system. Electrostatic motor is driven with high voltage and low current that generate a very small magnetic field. In this paper non-contact levitation and driving control systems for DEMED are proposed. A non-contact levitation motor using DEMED utilizes the same electrodes for non-contact levitation and driving. For controlling attractive force, bias voltage is superposed onto driving voltage. Levitation and driving were realized with levitation gap of 200μm and the maximum driving speed of 20mm/s.
社団法人日本機械学会の論文
2003-04-18