305 YAG レーザによるガラス基板のマイクロ接合(第 3 報) : 石英ガラス基板への適用

概要

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This paper deals with the micro-welding of the glass substrates by YAG laser. The micro-welding technology is required for the precision assembly of the micro components in the optical transmission devices, LCD plate and so on. In the conventional welding method of the glass materials, glass components were bonded to glass substrates by bond material which was melted by heat energy. In our proposed method, a pair of glass plates was overlapped, in which the absorbent was painted on the welding area of glass surface, and the YAG laser was absorbed in only the painted area. Therefore only the interface between two plates will be welded and glass surface will be clear. In this study welding of the silica glass used as micro glass parts was tried, and the possibility of the application was examined. In the experiments, slide glasses were welded by YAG laser, the welding point was observed, chemical analysis, welding strength was measured and an optical module was made for trial purposes.
2003-08-15