YAGレーザによるガラス基板のマイクロ接合(第1報) : レーザ透過性を利用したガラス界面の接合法の提案とその可能性検証

概要

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This paper deals with the micro-welding of the glass substrates by YAG laser beam. The micro-welding technology is required for the precision assembly of the micro components in the optical transmission devices, LCD plate and so on. In the conventional welding method of the glass materials, glass components were bonded to glass substrates by bond material which was melted by heat energy. In our proposed method, a pair of glass plates was overlapped, in which the absorbent was painted on the welding area of glass surface, and the YAG laser beam was absorbed in only the painted area. Therefore only the interface between two plates will be welded and glass surface will be clear. In this study a feasibility study of a newly developed welding method was carried out. In the experiments, slide glasses were welded by YAG laser beam, the welding point was observed and welding strength was measured.
公益社団法人精密工学会の論文
2002-09-05