環境に優しい鏡面研削砥石の作製に関する一考察 : 加工メカニズムに基づく開発指針

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Until now, the criteria to evaluate the processing technique have been mainly lying in the aspects of cost, accuracy, quality, efficiency and stability. With the criterion on environmental contamination added in, the realization of the environmental harmony type of proccssing technique is becoming an important topic. As thc first stcp of this research, this paper aims to find out the fundamental guideline in developing a harmless grinding wheel, which may be used in the mirror grinding of the silicon. Harmless materials for human being were selected as the constituent materials. Sodium alginate was used as the bonding agent and barium sulfate was used as the abrasive grain. The performance of the wheel was investigated by the grinding of the 8-inch silicon wafer. In dry grinding, a stable mirror surface with around 10nm roughness (Ry) was obtained, and the processing strain was very small, furthermore, small acicular silicon was observed in the grinding chips. However, toxic S0_3 was detected in the gas arising in the grinding process. By this new method, the grinding wheel that basically met the conventional was prototyped experimentally. The mechanochemical reaction, which is usually difficult to be proved, can be easily confirmed by the happening of noxious gas. It aiso clarified that although the grinding wheel was made of harmless material, noxious material happened frorn mechanochemical reaction.
公益社団法人精密工学会の論文
2001-03-05

環境に優しい鏡面研削砥石の作製に関する一考察 : 加工メカニズムに基づく開発指針

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