509 窒化アルミのELIDラップ研削加工特性(機械工作・生産工学)

概要

論文の詳細を見る
Aluminum nitride ceramic is of significant interest due to its excellent physical, chemical and mechanical properties. However it is difficult to achieve a mirror surface by conventional grinding method, because it tends to generate intergranular fracturing. In this study, electrolytic in-process dressing (ELID) grinding characteristics of aluminum nitride was investigated experiments, it was applied that two kind of machining methods, the one was a constant pressure ELID lap-grinding using a lap-grinding machine and the other was an in-feed ELID grinding using an ultra-precision rotary grinding machine. Roughness produced by ELID-lap grinding was better in comparison of that by the in-feed-grinding. The surface roughness obtained by ELID-lap grinding was 7.5nmRa and 85.5nmRy, and mirror surface finishing could be achieved.
一般社団法人日本機械学会の論文
2000-08-15