813 ELID研削による脆性材料の薄片化の試み(ELID研削)(OS.1 生産加工・工作機械)

概要

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For the purpose of realizing the efficient and highly accurate machining, we proposed the simultaneous grinding method of different materials in ELID grinding. We are carrying out studies to grasp the basic feature of this grinding technique. In this study, the attempts on the mirror surface grinding of Si thin sheets using the simultaneous grinding method and fine diamond wheels were carried out and its grinding performance was investigated. Experimental results showed that mirror surface finishing to a thickness of 50μm could also be achieved using a #40000 diamond wheel. In this case, the obtained surface roughness was 14.5nm Ry. The experimental results confirmed that this method is use for obtaining thin sheets with mirror surface finishing.
一般社団法人日本機械学会の論文
2001-03-09