3606 金属ガラス製マイクロ構造部品の精密成形(S60 超精密・微細加工,S60 超精密・微細加工)

概要

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Recently, more miniaturization and higher integration of LSI are required and the size of electrode pad on LSIs has become narrower. In the manufacturing process of LSI, the electric property has to be checked with IC probes by contacting the probe to check and the size and pitch of the probes are also required to be smaller. In this study, it paid attention to the metallic glass in order to develop smaller probes. The metallic glass is a metal with an amorphous structure and it has an excellent character for the spring material as follows: high strength and high elasticity limit Moreover, the size effect of metallic glass is small because it is an isotropic and a homogeneous material. It can be mold by the glass molding process. In the experiments, metallic glass was molded by using flat surface molds and structured molds with V-shaped micro grooves as the basic experiment.
2007-09-07