マイクロ非球面の超精密研削に関する研究 : 斜軸研削法によるマイクロ非球面の鏡面研削の可能性検証

概要

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This paper deals with the grinding of the micro aspherical surfaces. A new grinding method and a grinding system with the inclined rotational axis of micro grinding wheel were developed. The grinding wheel axis is 45 degrees inclined from the workpiece rotational axis. The micro wheel was resinoid bonded diamond wheel of #1200 in the grain size. The wheel was formed to a precise columnar shape of 0.8 mm in the diameter by a single crystal diamond truer on the machine. The grinding spindle is equipped with an air bearing and the maximum rotational rate is 10×1O' rpm. In the grind, ing test, WC (tungsten carbide) of the glass molding die was tested. The primary grinding workpiece was measured for the distributions of the form deviation profiles to evaluate the deviations of the tool positioning and the tool radius. The NC-program was then edited to compensate reproducible errors. By the developed system, the form accuracy of about 0.1 μm P-V and the surface roughness of less than 0.03 μm Rmax were obtained.
社団法人精密工学会の論文
1998-04-05