磁気援用研磨に関する研究 : 球面形状への適用

概要

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Recently, several types of new polishing methods using a magnetic fluid have been developed and fundamental studies have been carried out. This paper describes an application of the magnetic field-assisted polishing to a spherical surface. This method is devised on the basis of the electro-magnetic behavior of the magnetic fluid. As a polishing test material, single crystal LiNbO_3 is examined. It is a manmade and hard-brittle material, and it is machined previously to a spherical surface 50mm in radius of curvature by diamond turning. The experimental results show that a surface roughness of 0.01 μm Rmax can be easily obtained when colloidal silica is used as a polishing abrasive. And it is clarified that the magnetic field strength is closely related to the pressure and the removal rate. Therefore, in the case of finishing curved surfaces precisely, the magnetic field distribution must be uniform.
公益社団法人精密工学会の論文
1989-06-05