ポリシャ表層の動的粘弾性挙動

概要

論文の詳細を見る
A vesicant polyurethane sheet is widely used in the polishing of silicon wafer and glass parts. It is believed that the visco-elastic property of vesicant polyurethane sheet and the geometrical form of vesicant layer may have a great influence on the polishing characteristics of workpiece. However, polishing mechanisms associated with the viscoelastic property of polisher have not been fully clarified. The present study was focussed on the measurements of visco-elastic property of surface layer in vesicant polyurethane polisher subjected to dynamic and creep loading. The measurements were conducted by using a newly develdped visco-elasticity measuring setup which operates electromagnetically. Main results obtained are as follows : The experiments show that the polisher operates rather hard in the case of dynamic loading than in the case of creep loading. It is found that the used polisher is very hard under the dynamic loading as compared with the virgin polisher. It is indicated that the temperature influences on the viscoelastic behavior of polisher.
公益社団法人精密工学会の論文
1983-09-05