回転スピン制御法による窒化ケイ素球の超精密研磨

概要

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Spin angle controlled ball lapping method developed recently, is to have an excellent performance to finish the ball, in which V-groove lapping plate is separated into two parts and three plates are able to rotate independently. However, lapping of ceramic ball such as a silicon nitride one is very hard. Present paper focuses on both of the grinding characteristics and polishing ones of a silicon nitride ball. Grinding is conducted using the diamond wheels with grain size degradation, and then polishing is performed with very fine diamond of average grain size of nano-meter. It is found that the grain size degradation grinding method has very effective performance of finishing of the silicon nitride ball. Polishing of the ceramic ball with slurry mixed super fine diamonds into an ion-exchanged water yields higher decrease of nano-meter level of surface roughness. Spin angle controlled finishing method describes that higher finishing performance rather than conventional one.
公益社団法人精密工学会の論文
2004-11-05