126 微細砥粒混合ERG研磨パッドによる研磨加工法の開発(OS-15 研磨技術)

概要

論文の詳細を見る
In recent years, the automation of polishing and fine finishing technologies has been required because polishing and finishing with high accuracy takes a long time and often depends on the experience and special skills of technical engineers. One of the promising polishing technologies is Field-assisted Fine Finishing (FFF), which has attracted the attention of many researchers. In FFF, an electric field or a magnetic field is applied for finishing and polishing process. In this study, a new polishing technology using Electro-rheological Gel (ERG) is proposed. The ERG we have developed is a functional material whose induced shear force changes according to the applied electric field intensity. A thin ERG sheet containing fine abrasives is applied to the polishing pad of a rotary polisher. The properties of the ERG polishing pad can be changed by adjusting the intensity of the electric field applied to the ERG pad. We conducted experiments to analyze the basic performance of the ERG polishing.
社団法人日本機械学会の論文
2006-11-24