C26 超音波援用マイクロ研削による研削面性状の高精度化(OS7 研削・砥粒加工(1))

概要

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These days, micro-processing has been increasingly demanded with downsizing of manufacturing products. Micro-grinding is one of methods to create a sub-millimeter size structure, such as micro-holes, micro-lenses and dental form-grinding. Due to using wheels with small diameters, ground surface textures could be worsened in micro-grinding. In this study, ultrasonic-assistance was employed on micro-grinding to improve the ground surface texture. Moreover, the surface improving mechanism of ultrasonic-assistance was considered based on the tip angle flattening effect of ultrasonic-assistance. As a result, the ground surface textures could be improved with ultrasonic-assisted micro-grinding and the surface improving mechanism of ultrasonic-assisted micro-grinding was confirmed experimentally.
2010-11-19