Low-Temperature Growth of Piezoelectric AlN Film and its Optical and Acoustical Properties : Acoustics Materials
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1982-07-01
著者
-
Shiosaki Tadashi
Department Of Electrical Engineering Ii Faculty Of Engineering Kyoto University
-
Kawabata Akira
Department Of Chemistry Faculty Of Science Fukuoka University
-
Harada Kazushige
Department Of Electronics Faculty Of Engineering Kyoto University
関連論文
- Advantages of Phase Measurement over Amplitude Measurement of Surface Acoustic Wave Using Optical Probing Method
- Characterization of Niobium-Doped Lead Titanate Thin Films
- Electrical Properties of LiNbO_3 Thin Films by RF Magnetron Sputtering and Bias Sputtering
- Preparation and Optical Waveguide Properties of LiNbO_3 Thin Films by IF Magnetron Sputtering
- Theoretical Study on Surface Acoustic Wave Characteristics of LiNbO_3 Films on Sapphire Substrates
- In-plane Observations of RF-sputtered LiNbO_3 Thin Films Using an Energy Dispersive Total-Reflection X-Ray Diffractometer
- Second Harmonic Generation in Nb_2O_5 Thin-Film Optical Waveguide Deposited on LiTaO_3 Substrate by RF Magnetron Sputtering
- Laser Micromachining of a Modified PbTiO_3 Ceramics in KOH Water Solution : A: APPLICATIONS AND FUNDAMENTALS
- Highly Oriented Nb-Doped Lead Titanate Thin Films by Reactive Sputtering: Electrical Properties
- Highly Oriented Nb-Doped Lead Titanate Thin Films by Reactive Sputtering : Fabrication and Structure Analyses
- Preparation and Properties of Niobium-Doped Pb[(Sc_Nb_)_Ti_]O_3 Ceramics Using Hot Isostatic Pressing
- Step Coverage Characteristics of Pb(Zr, Ti)O_3 Thin Films on Various Electrode Materials by Metalorganic Chemical Vapor Deposition
- High Velocity and High Coupling Surface Acoustic Waves Using ZnO Films on Ceramic Substrates with High Acoustic Velocity : SAW and Communication Devices
- Preparation of Tungsten-Bronze Thin Films : Thin Films
- Crystal Growth of Li_2B_4O_7 and its Leaky SAW Properties : F: FERROELECTRIC MATERIALS
- Epitaxial Growth and Electrical Properties of Ferroelectric Pb(Zr_Ti_)O_3 Films by Reactive Sputtering
- Se Film Piezoelectric Transducer Deposited on Te Crystal
- Preparation of Oxide Thin Films by Laser Ablation
- Optical Measurement of Acoustic Velocity and Poisson's Ratio in Disk Piezoelectric Transducer
- Space-Periodic Modulation Model of Piezoelectric Polarization Due to Photorefractive Internal Field for Generation of Nonlinear Vibration
- Optical Measurement of Piezoelectric Vibration in Circular Rod and Disk Ceramics
- Measurement of Piezoelectric Vibration Using Optical Fiber : Ultrasonic Measurement
- Growth of Potassium Lithium Niobate Single-Crystal Fibers by the Laser-Heated Pedestal Growth Method
- Low-Temperature Mixed Sintering of Pb(Zr_Ti_x)O_3-Pb(Zn_Nb_)O_3 Ceramics and Their Pyroelectric Properties
- Low-Temperature Sintering of Pb(Mg_Nb_)O_3-PbTiO_3 Ceramics with Addition of PbO-Bi_2O_3
- Low Temperature Growth of Piezoelectric Films by RF Reactive Planar Magnetron Sputtering : Communication Devices and Materials
- Growth of BaTiO_3:Ce Single Crystals and Their Properties
- Relaxation Oscillations in PbLa(ZrTi)O_3 Transparent Ceramics
- Optical Associative Memory Using LiNbO_3:Fe Hologram and BaTiO_3 Phase Conjugate Mirror ( FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
- Phase Transition and Pyroelectric Properties in Pb(Zn_Nb_)O_3-PZT Based System : F: FERROELECTRIC MATERIALS
- Machining of PZT, PT and (Mn, Zn)Fe_2O_4 Ceramics by Laser-Induced Chemical Etching : P: Pyroelectrics
- Pyroelectric and Dielectric Properties of Rhombohedral Pb(Zr_Ti_x)O_3 Ceramics : F: Ferroelectric Materials
- Detection and Application of Acoustic Emission in Laser-Enhanced Chemical Etching : Photoacoustic Spectroscopy and Ultrasonic Microscopy
- Sputter-Deposition of [111]-Axis Oriented Rhombohedral PZT Films and Their Dielectric, Ferroelectric and Pyroelectric Properties
- Crystal Growth of Lithium Tetraborate(Li_2B_4O_7) : C: Single Crystals
- Elastic, Piezoelectric, Acousto-Optic and Electro-Optic Properties of Li_2B_4O_7 : General Acoustics
- K_3Li_2Nb_5O_ and Pb_2KNb_5O_15 Tungsten-Bronze Films for SAW Devices : THIN FILM
- K_3Li_2Nb_5O_ Optical Waveguides Fabricated on Sapphire by RF Sputtering
- Epitaxial Growth of Potassium Lithium Niobate Single-Crystal Films on Potassium Bismuth Niobate Single Crystals by the EGM Technique
- Epitaxial Growth of Potassium Lithium Niobate Single-Crystal Films on Potassium Bismuth Niobate Single Crystals by RF Sputtering
- Second Harmonic Generation in As-Sputtered ZnO Optical Waveguide
- Acoustic and Acousto-Optic Properties of Amorphous Se
- Acoustically Phase-Matched Noncollinear Optical Second Harmonic Generation in Tellurium : B-7: OPTICAL DEVICES (2)
- Acoustooptic Properties of Amorphous Selenium
- Acoustooptic Properties of Tellurium Single-Crystal at 10.6 μm
- Electrooptic Effect in Thallium-Doped Selenium Crystal at 10.6 μm
- Current Saturation Related to Internal Potential Barrier in Se Crystal
- Current Saturation Effect in Trigonal Selenium
- Acoustoelectric Phenomena by the Two Carriers in Se-Te Alloy Crystals
- Characterization of Brevilysin H1, an α-Fibrinogenolytic Metalloproteinase from the Venom of Chinese Snake (Gloydius blomhoffi brevicaudus)
- Piezoelectric Properties of Se Film Deposited on Te Crystal
- Ultrasonic Amplification in Se-Te Alloy Crystals at Room Temperature
- Elastic Constants of Se-Te Alloy Crystals
- Effects of Oxygen Concentration on Growth of Bi_4Ti_3O_ Thin Films by Metalorganic Chemical Vapor Deposition ( FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
- Preparation of C-Axis-Oriented Bi_4Ti_3O_ Thin Films by Metalorganic Chemical Vapor Deposition
- Preparation and Properties of Pb(Sc_Nb_)O_3 Pb_La_Ti_O_3(PSN-PLT) Solid-Solution Ceramics
- Ferro- and Piezo-Electric Properties for F_ to F_ Phase Transition of PZT System : F: Ferroelectric Materials
- Observation of Light Scattering in Lithium Niobate
- Effects of Growth Rate on Properties of Pb(Zr, Ti)O_3 Thin Films Grown by Chemical Vapor Deposition
- Thin Film Growth of Pb(Zr,Ti)O_3 by Photoenhanced Metalorganic Chemical Vapor Deposition Using NO_2
- Switching Kinetics of Pb(Zr,Ti)O_3 Thin Films Grown by Chemical Vapor Deposition
- Growth of Pb(Zr, Ti)O_3 Thin Films by Photoenhanced Chemical Vapor Deposition and Their Properties
- Effects of the Reaction Pressure on the Growth of PbTiO_3 Thin Films by the Photo-Chemical Vapor Deposition Method
- Growth and Properties of PbTiO_3 Thin Films by Photoenhanced Chemical Vapor Deposition : Thin Films
- The Electrooptic Effect in Cubic ZnSe at 10.6 μ
- Dependence of Crystalline Structure and Lattice Parameters on Film Thickness in PbTiO_3/Pt/MgO Epitaxial Structure
- Direct Observation of Photoinduced Gratings in LiNbO_3:Fe Single Crystals Using a Scanning Electron Microscope
- Thermal Effects in Properties of Photovoltaic Currents of Pb(Zr, Ti)O_3 Thin Films
- Crystal Growth of LiNbO_3:Fe and Its Photorefractive Properties : Ferroelectrics
- The Relation between Acoustoelectric Non-Ohmic Conduction and Carrier Concentration in Tellurium at 77 K
- Acoustoelectric Effect in Se-Te Alloy Crystals at Room Temperature
- Electrical Properties of Piezoelectric Transducers with Space-Periodic Charge Distribution and Control of Properties
- Chemical Vapor Deposition of Single-Crystalline ZnO Film with Smooth Surface on Intermediately Sputtered ZnO Thin Film on Sapphire
- VHF/UHF Composite Resonator on a Silicon Substrate : Generation and Detection of Ultrasonics
- Low-Temperature Growth of Piezoelectric AlN Film and its Optical and Acoustical Properties : Acoustics Materials
- Preparation of Highly C-Axis Oriented ZnO Thin Films by Plasma-Enhanced Metalorganic Chemical Vapor Deposition : Acoustics Materials
- High-Reflectivity Self-Pumped Phase Conjugation and Mechanisms for Improvement of Response Speed ( FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
- Spontaneous Trasition between Relaxor and Ferroelectric States in Lanthanum-Modified Lead Zirconate Titanate (6-7)/65/35
- Liquid-Phase-Sintering of Barium Titanate and Its Modified Ceramics with Addition of Pb_5Ge_3O_ : F: FERROELECTRIC MATERIALS
- Piezoelectric Properties of Potassium Tantalate-Niobate Single Crystal
- Single Crystal Growth of Se-Te Alloys onto Tellurium from the Melts
- Influence of Photorefractive Effect on Piezoelectric Vibration
- Epitaxial Vapor Growth of Se-Te Alloy Films onto Tellurium
- Fabrication Techniques and Properties of Piezoelectric Thin Films of ZnO and AlN
- Preparation and Properties of Pb[(Sc_Nb_)_Ti_]O_3 Ceramics ( FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
- Preparation and Characterization of Pb(Zr_xTi_)O_3 Thin Films by Reactive Sputtering Using an Alloy Target
- Generation of Phase Conjugate Wave Using LiNbO_3:Fe and Application to Optical Associative Memory
- Optical Associative Memory Using LiNbO_3:Fe Hologram : Optical Applications
- Anomalous Photovoltaic Current and Diffraction Efficiency in LiNbO_3 Single Crystals
- Surface Wave Delay Lines with Interdigital Transducers on Unpolarized PZT Ceramic Plates
- Preparation and Switching Kinetics of Pb(Zr, Ti)O_3 Thin Films Deposited by Reactive Sputtering : Thin Films
- Control of Orientation of Pb(Zr, Ti)O_3 Thin Films Using PbTiO_3 Buffer Layer ( FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
- Effects of O_3 on Growth and Electrical Properties of Pb(Zr, Ti)O_3 Thin Films by Photoenhanced Metalorganic Chemical Vapor Deposition ( FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
- Characterization of Niobium-Doped Lead Titanate Thin Films
- Preparation and Properties of Pb(Sc1/2Nb1/2)O3–Pb0.85La0.15Ti0.96O3 (PSN-PLT) Solid-Solution Ceramics