Preparation of Highly C-Axis Oriented ZnO Thin Films by Plasma-Enhanced Metalorganic Chemical Vapor Deposition : Acoustics Materials
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1982-07-01
著者
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Shiosaki Tadashi
Department Of Electrical Engineering Ii Faculty Of Engineering Kyoto University
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Kawabata Akira
Department Of Chemistry Faculty Of Science Fukuoka University
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Shimizu Masaru
Department Of Chemical Engineering Faculty Of Engineering Tokyo University Of Agriculture And Techno
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- Theoretical Study on Surface Acoustic Wave Characteristics of LiNbO_3 Films on Sapphire Substrates
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