Low Temperature Growth of Piezoelectric Films by RF Reactive Planar Magnetron Sputtering : Communication Devices and Materials
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1981-09-01
著者
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YAMAMOTO Takashi
Department of Cardiovascular and Respiratory Medicine, Shiga University of Medical Science
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Oda Takafumi
Department of Materials Engineering, Faculty of Engineering, The University of Tokyo
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Yamamoto Takashi
Department Of Cardiovascular And Respiratory Medicine Shiga University Of Medical Science
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Shiosaki Tadashi
Department of Electronic, Faculty of Engineering, Kyoto University
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Shiosaki Tadashi
Department Of Electrical Engineering Ii Faculty Of Engineering Kyoto University
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Oda Takafumi
Department Of Electronics Faculty Of Engineering Kyoto University
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Kawabata Akira
Department Of Electronics And Informatics Faculty Of Engineering Toyama Prefectural University
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HARADA Kazushige
Department of Electronics, Faculty of Engineering, Kyoto University
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Kawabata Akira
Department Of Chemistry Faculty Of Science Fukuoka University
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Harada Kazushige
Department Of Electronics Faculty Of Engineering Kyoto University
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Yamamoto Takashi
Department Of Cardiology Tokushima Prefectural Central Hospital
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Yamamoto Takashi
Department Of Applied Chemistry Faculty Of Engineering Ehime University
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