Epitaxial Growth and Electrical Properties of Ferroelectric Pb(Zr_<0.9>Ti_<0.1>)O_3 Films by Reactive Sputtering
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概要
- 論文の詳細を見る
Ferroelectric Pb(Zr_<0.9>Ti_<0.1>)O_3 thin films have been successfully obtained on the pt/(0001) sapphire substrates and the Pt/SiO_2/(100)Si substrates by reactive sputtering of the multimetal target. The films with perovskite structure have been grown at substrate temperatures of 600-620℃. The epitaxial films have been obtained on the Pt/(0001) sapphire substrates and the oriented. films have been obtained on the Pt/SiO_2/(100)Si substrates. The crystallinity of the Pb(Zr_<0.9>Ti_<0.1>)O_3 film depended on the substrate temperature and the crystallinity of the platinum film used as the bottom electrode. The films showed ferroelectricity, and the switching speed was measured as 50 ns at 8 V for the 0.60 μm film on the Pt/SiO_2/(100)Si substrate.
- 社団法人応用物理学会の論文
- 1991-05-15
著者
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Shiosaki Tadashi
Department of Electronic, Faculty of Engineering, Kyoto University
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Okamura T
Central Research Laboratory Kyocera Corporation
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Okamura Takeshi
Department Of Electronics Faculty Of Engineering Kyoto University
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Okamura Takeshi
Electrotechnical Laboratory:(present Address) Central Research Laboratory Kyocera Corporation
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ADACHI Masatoshi
Department of Electronics and Informatics, Faculty of Engineering, Toyama Prefectural University
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Shiosaki Tadashi
Department Of Electrical Engineering Ii Faculty Of Engineering Kyoto University
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Kawabata A
Department Of Electronics And Informatics Faculty Of Engineering Toyama Prefectural University
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Kawabata Akira
Department Of Electronics And Informatics Faculty Of Engineering Toyama Prefectural University
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Okamura T
Optical Disks Development Department Division Of Information And Devices Technologies Asahi Chemical
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OKAMURA Takeshi
Kyocera Corporation
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Adachi Masatoshi
Department Of Electronics And Informatics Faculty Of Engineering Toyama Prefectural University
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Adachi Masatoshi
Department Of Electronics And Informatics Faculty Of Enggineering Toyama Prefectural University
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Kawabata Akira
Department Of Chemistry Faculty Of Science Fukuoka University
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Adachi Masatoshi
Department Of Chemistry And Biotechnology Graduate School Of Engineering Tottori University
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