Sputter-Deposition of [111]-Axis Oriented Rhombohedral PZT Films and Their Dielectric, Ferroelectric and Pyroelectric Properties
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概要
- 論文の詳細を見る
[111]-oriented PZT films have been successfully grown with good epitaxy onto epitaxial platinum film substrates by the rf-magnetron sputtering method using Pb enriched PZT(90/10) targets. The sputtering conditions for growing epitaxial films were investigated. Crystallographic identifications of the films were made by the X-ray and RHEED measurements. Dielectric, ferroelectric and pyroelectric properties of these films were measured. Pyroelectric coefficients at room temperature were determined as 45 and 3X10^<-9>C/cm^2 K for epitaxial PZT films with poling and without poling treatments, respectively. Epitaxial PZT films sputtered on Pt/sapphire possess desirable properties for potential applications to pyroelectric devices.
- 社団法人応用物理学会の論文
- 1987-04-20
著者
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YAMADA Takehiro
Department of Hospital Pharmacy & Pharmacology,Asahikawa Medical College,Japan
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Shiosaki Tadashi
Department of Electronic, Faculty of Engineering, Kyoto University
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ADACHI Masatoshi
Department of Electronics and Informatics, Faculty of Engineering, Toyama Prefectural University
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Shiosaki Tadashi
Department Of Electrical Engineering Ii Faculty Of Engineering Kyoto University
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Kawabata A
Department Of Electronics And Informatics Faculty Of Engineering Toyama Prefectural University
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Kawabata Akira
Department Of Electronics And Informatics Faculty Of Engineering Toyama Prefectural University
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Adachi Masatoshi
Department Of Electronics And Informatics Faculty Of Engineering Toyama Prefectural University
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MATSUZAKI Tokuo
Department of Electronics, Faculty of Engineering, Kyoto University
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Yamada Takehiro
Department Of Electronics Faculty Of Engineering Kyoto University
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Adachi Masatoshi
Department Of Electronics And Informatics Faculty Of Enggineering Toyama Prefectural University
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Matsuzaki Tokuo
Department Of Electronics Faculty Of Engineering Kyoto University:(present Address) Central Research
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Kawabata Akira
Department Of Chemistry Faculty Of Science Fukuoka University
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Adachi Masatoshi
Department Of Chemistry And Biotechnology Graduate School Of Engineering Tottori University
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