Influence of Substrate Misorientation on Carbon Incorporation in GaAs by Metal Organic Chemical Vapor Deposition
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1994-03-15
著者
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Watanabe N
Ntt Photonics Laboratories
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WATANABE Noriyuki
NTT Photonics Laboratories
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NITTONO Takumi
NTT LSI Laboratories
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WATANABE Noriyuki
NTT LSI Laboratories
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ITO Hiroshi
NTT LSI Laboratories
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ISHIBASHI Tadao
NTT LSI Laboratories
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