Carbon Doping in AlGaAs Using Trimethylarsine by Metalorganic Chemical Vapor Deposition with a High-Speed Rotating Susceptor
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1995-04-15
著者
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Watanabe N
Ntt Photonics Laboratories
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WATANABE Noriyuki
NTT Photonics Laboratories
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WATANABE Noriyuki
NIT LSI Laboratories
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ITO Hiroshi
NIT LSI Laboratories
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ISHIBASHI Tadao
NIT LSI Laboratories
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Watanabe Norikazu
Electrotechnical Lanoratory
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Watanabe N
Mitsubishi Materials Corp. Omiya Jpn
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Ishibashi T
Ntt Photonics Laboratories
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Ito H
Ntt Photonics Laboratories Ntt Corporation
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WATANABE Noemia
Laboratorio de Quartzo, Departamento de Materiais, Faculdade de Engenharia Mecanica, UNICAMP
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