Contactless and Nondestructive Characterization of Silicon Surfaces by Capacitance-Voltage and Photoluminescence Methods
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概要
- 論文の詳細を見る
- 1995-08-21
著者
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HASEGAWA Hideki
Research Center for Integrated Quantum Electronics (RCIQE), Hokkaido University
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Koyanagi Satoshi
Research Center For Interface Quantum Electronics And Department Of Electrical Engineering Hokkaido
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AKAZAWA Masamichi
Research Center for Integrated Quantum Electronics, Hokkaido University
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Akazawa Masamichi
Research Center For Interface Quantum Electronics And Department Of Electrical Engineering Hokkaido
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