Optical and Electrical Properties of Nitrogen-Doped Diamond-Like Carbon Films Prepared by a Bipolar-Type Plasma-Based Ion Implantation (Special Issue : Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials)

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概要

• 論文の詳細を見る

著者

• Kishi Naoki

  Department Of Chemistry And Institute For Advanced Research Nagoya University

• Nakao Setsuo

  Materials Research Institute For Sustainable Development National Institute Of Advanced Industrial S

• Soga Tetsuo

  Department of Electrical and Computer Engineering, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466

• Sonoda Tsutomu

  Materials Research Institute for Sustainable Development, National Institute of Advanced Industrial Science and Technology (AIST), Nagoya 463-8560, Japan

• Asada Tokuhiro

  Department of Frontier Materials, Nagoya Institute of Technology, Nagoya 466-8555, Japan

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