Characteristics and Improved Design of Piezoresistive Rotation Angle Sensor Integrated in Micromirror Device
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概要
- 論文の詳細を見る
The characteristics and design of an improved piezoresistive rotation angle sensor integrated in a micromirror device are described. This study focuses on realizing higher resolution and accuracy in sensing the micromirror rotation angle compared with results reported in previous research. The structural design takes account of stress and temperature distributions. The lower resistance for current enables lock-in detection of rotation angle signals at a frequency higher than the mechanical resonant frequency of the micromirror, and the fluctuation generated by sensing the signal can be minimized. The resolved rotation angle is 0.02° and hysteresis of the signal is less than 4%.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2009-04-25
著者
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Kumagai Shinya
Department Of Physics School Of Science And Technology Meiji University
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Hane Kazuhiro
Department Of Electronic Mechanical Engineering Faculty Of Engineering Nagoya University
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Sasaki Minoru
Department Of Acoustic Design Kyushu Institute Of Design
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Tabata Motoki
Department of Nanomechanics Engineering, Tohoku University, 6-6-01 Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Tabata Motoki
Department of Nanomechanics, Graduate School of Engineering, Tohoku University, Aza-Aoba 6-6-01, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Aonuma Takuro
Department of Advanced Science and Technology, Toyota Technological Institute, 2-12-1, Hisakata, Tenpaku-ku, Nagoya 468-8511, Japan
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Kumagai Shinya
Department of Advanced Science and Technology, Toyota Technological Institute, 2-12-1, Hisakata, Tenpaku-ku, Nagoya 468-8511, Japan
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