Fabrication of Analog- and Digital-Modulated Pitch-Variable Gratings Using Silicon-on-Insulator Substrates
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概要
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We fabricated pitch-variable gratings using silicon microactuators, which are highly compatible with micro-electro-mechanical systems technologies. To obtain a large change in diffraction angle with a small driving force, the grating period was designed to be as small as 4 μm. Two types of pitch-variable grating, namely, thermal-driven analog-modulated grating and electrostatic-driven digital-modulated grating, were newly designed and fabricated. Silicon-on-insulator substrates were used for the fabrication. Both gratings were fabricated with high accuracy. The changes in diffraction angles agreed well with the calculated values.
- 2008-06-25
著者
-
Hane Kazuhiro
Department Of Electronic Mechanical Engineering Faculty Of Engineering Nagoya University
-
Kanamori Yoshiaki
Department Of Machatronics And Precision Engineering Tohoku University
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KOBAYASHI Takashi
Department of Applied Physics,Faculty of Engineering,Nagoya University
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