Application of Photothermal Vibration to a Diaphragm Manometer in a Medium-Vacuum Region
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概要
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Application of photothermal vibration to a diaphragm manometer is described. The resonance frequency of the photothermal vibration was measured for a diaphragm to which a differential pressure was applied. Upon increasing pressure from 0.5 to 3×10^3 Pa, the resonance frequency increased monotonically by 3 kHz, the shift of which was independent of the gas species in the above vacuum region.
- 社団法人応用物理学会の論文
- 1992-08-15
著者
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Hane Kazuhiro
Department Of Electronic Mechanical Engineering Faculty Of Engineering Nagoya University
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INABA Seiki
Department of Electrical Engineering, Gifu National College of Technology
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Inaba Seiki
Department Of Electrical Engineering Gifu National College Of Technology
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