Flow Analysis of Photoresist Spray Coating towards Improving Coverage on Three-Dimensional Structures
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概要
- 論文の詳細を見る
Gas flow in photoresist spray coating is numerically analyzed to reveal the flow in the vicinity of a substrate with trench structures. With increasing Reynold's number, gas flows enter the trenches to deeper positions, forming vortexes. Compared with experimental results, it is shown that bump formations, which are frequently observed around the convex corner of the trench sidewall, are related to the position of the boundary between the flow ejected from the spray nozzle and the vortexes confined inside the trenches. Moving laterally away from the center axis of the nozzle, the lateral flow along the substrate surface becomes dominant in the vicinity of the substrate and, consequently, photoresist particles tend to deposit on top of the trenches.
- 2011-10-25
著者
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Sasaki Minoru
Department Of Acoustic Design Kyushu Institute Of Design
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Kumagai Shinya
Department of Advanced Science and Technology, Toyota Technological Institute, 2-12-1, Hisakata, Tenpaku-ku, Nagoya 468-8511, Japan
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Tajima Hisayoshi
Department of Advanced Science and Technology, Toyota Technological Institute, Nagoya 468-8511, Japan
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