Photoresist Spray Coating Using a Shield Plate with an Aperture for Uniform Deposition onto Trench-Type Three-Dimensional Microdevice Structures (Special Issue : Solid State Devices and Materials (1))
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
著者
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Fukuda Naoya
Department Of Computer Simulation Okayama University Of Science
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Sasaki Minoru
Department Of Acoustic Design Kyushu Institute Of Design
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Kumagai Shinya
Department of Advanced Science and Technology, Toyota Technological Institute, 2-12-1, Hisakata, Tenpaku-ku, Nagoya 468-8511, Japan
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Tajima Hisayoshi
Department of Advanced Science and Technology, Toyota Technological Institute, Nagoya 468-8511, Japan
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