High-Resolution Scanning Electron Microscopy Observation of Electrochemical Etching in the Formation of Gate Grooves for InP-Based Modulation-Doped Field-Effect Transistors

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1999-02-28

著者

• ENOKI Takatomo

  NTT System Electronics Laboratories

• SUEMITSU Tetsuya

  NTT System Electronics Laboratories

• ISHII Yasunobu

  NTT System Electronics Laboratories

• Xu D

  Division Of Rheumatology Department Of Medicine University Of Southern California Keck School Of Med

• Xu Dong

  Ntt System Electronics Laboratories:(present Address)department Of Electrical Engineering University

• Ishii Y

  Waseda Univ. Tokyo Jpn

• Enoki Takatomo

  Ntt Photonics Laboratories

• Ishii Y

  Yamaguchi Univ. Ube‐shi Jpn

• Suemitsu T

  Ntt Photonics Lab. Kanagawa Jpn

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