Etch Pit Observation of GaP Growrn on Si Substrate by Metalorganic Chemical Vapor Deposition

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1994-12-15

著者

• SOGA Tetsuo

  Instrument and Analysis Center, Nagoya Institute of Technology

• JIMBO Takashi

  Research Center for Micro-Structure Device, Nagoya Institute of Technology

• UMENO Masayoshi

  Department of electrical and Computer Engineering, Nagoya Institute of Technology

• Umeno Masayoshi

  Department Of Electric And Computer Engineering Nagoya Institute Of Technology

• Soga T

  Department Of Environment Technology And Urban Planning Nagoya Institute Of Technology

• Nishikawa H

  Osaka Univ. Osaka Jpn

• Ishikawa H

  Research Center For Nano-device And System Nagoya Institute Of Technology

• Soga T

  Nagoya Inst. Technol. Nagoya Jpn

• Soga Tetsuo

  Instrument And Analysis Center Nagoya Institute Of Technology

• NISHIKAWA Hironobu

  Department of Physics, Nagoya Institute of Technology

• Nishikawa Hironobu

  Department Of Physics Nagoya Instite Of Technology

• Nishikawa Hironobu

  Department of Electrical and Computer Engineering, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466

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