Variation of Photoluminescence Properties of Stain-Etched Si with Crystallinity of Starting Polycrystalline Si Films
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1994-12-15
著者
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Asano Tanemasa
Center For Microelectronic Systems Kyushu Institute Of Technology
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HIGA Katsuya
Center for Microelectronic Systems, Kyushu Institute of Technology
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Higa Katsuya
Center For Microelectronic Systems Kyushu Institute Of Technology
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Asano Tanemasa
Center For Microelectrortic Systems Kyushu Institute Of Technology
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MIYASATO Tatsuro
Department of Computer Science and Electronics, Kyushu Institute of Technology
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Miyasato Tatsuro
Department of Applied Science for Integrated System Engineering, Graduate School of Engineering, Kyushu Institute of Technology
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ASANO Tanemasa
Center for Microelectrortic Systems, Kyushu Institute of Technology
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