D315 A NOVEL FLUIDIC MICROMOTOR DRIVEN BY THERMOCAPILLARY FORCE(Micro-scale phenomena)
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概要
- 論文の詳細を見る
A thermally controlled micromotor is developed by using surface micromachining technique. The driving force of this motor is surface tension imbalance on gas-liquid interface. Eighteen thin-film heaters as small as 80 μm are fabricated in a circle of 2mm diameter on glass substrate and immersed in liquid. These microheaters not only generate vapor microbubbles of the order of 100 μm but drive them from heater to heater due to the Marangoni effect, which means that microscale thermal control can yield a steep temperature gradient even around the vapor bubble surface. Sequential switching of all these heaters accomplishes the circular motion of bubble, which is intended to rotate a solid plate above the liquid layer. The obtained motion of a microbubble enables us to understand the thermofluidic mechanisms of this novel microelectromechanical system.
- 一般社団法人日本機械学会の論文
- 2000-10-01
著者
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TAKAHASHI Koji
Department of Pediatrics, Nihon Kokan Hospital
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Yoshino Koichiro
Department Of Aeronautics And Astronautics Kyushu University
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Asano Tanemasa
Center For Microelectronic Systems Kyushu Institute Of Technology
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Nagayama Kunihito
Department of Aeronautics and Astronautics, Kyushu University
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Nagayama Kunihito
Department Of Aeronautics And Astronautics Kyushu University
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Takahashi Koji
Department Of Chemistry And Chemical Engineering Yamagata University
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Takahashi Koji
Department Of Aeronautics And Astronautics Kyushu University
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Nagayama Kunihito
Department Of Aeronautics And Astronautics
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Asano Tanemasa
Center for Microelectronic Systems, Kyushu Institute of Technology
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TAKAHASHI Koji
Departent of Materials Science and Engineering,Faculty of Engineering,Yamagata University
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