Ion Beam Modification of a Photoresist and Its Application to Field Emitters
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1997-12-30
著者
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Shibata E
中華人民共和国
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Shibata Eiji
Center For Microelectronic Systems Kyushu Institute Of Technology
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Shibata Eiji
Graduate School Of Kumamoto University
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Shibata Eiji
Aichi Medical University
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Shibata Eiji
Department Of Medical Technology Faculty Of Health Sciences Nagoya University School Of Medicine
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Asano T
Kyushu Inst. Technol. Fukuoka Jpn
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Asano Tanemasa
Center For Microelectronic Systems Kyushu Institute Of Technology
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SASAGURI Daisuke
Center for Microelectronic Systems, Kyushu Institute of Technology
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HIGA Katsuya
Center for Microelectronic Systems, Kyushu Institute of Technology
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Higa K
Oshima National Coll. Maritime Technol. Yamaguchi Jpn
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Higa Katsuya
Center For Microelectronic Systems Kyushu Institute Of Technology
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Sasaguri Daisuke
Center For Microelectronic Systems Kyushu Institute Of Technology
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Sasaguri D
Center For Microelectronic Systems Kyushu Institute Of Technology
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